Microscopic view of scanning tunneling microscopy
- Julian Chen
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Publications
358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Composition and structure of boron nitride films deposited by chemical vapor deposition from borazine
- J. Kouvetakis
- V.V. Patel
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Kinetics and mechanics of Si2H6 surface decomposition on Si
- C.M. Greenlief
- H.H. Sawin
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Nanomechanics of a Au-lr contact using a bidirectional atomic force microscope
- Sidney R. Cohen
- Gabi Neubauer
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Ta as a barrier for the Cu/PtSi, Cu/Si, and Al/PtSi structures
- Chin-An Chang
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Plasma induced gas heating in electron cyclotron resonance sources
- S.M. Rossnagel
- S.J. Whitehair
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Process effects on radio frequency diode reactively sputtered ZrO2films
- M.M. Yang
- T.M. Reith
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surface reactions in Si chemical vapor deposition from silane
- S.K. Kuikarni
- H.H. Sawin
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Thermal roughening studied by scanning tunneling microscopy
- J.W.M. Frenken
- R.J. Hamers
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Reactive ion etching of plasma enhanced chemical vapor deposition amorphous silicon and silicon nitride: Feeding gas effects
- Yue Kuo
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films