Modeling planarization with polymers
- Debra B. LaVergne
- Donald C. Hofer
- 1989
- Proceedings of SPIE 1989
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233 results at Proceedings of SPIE 1989
Optics for machine vision
- T.C. Strand
- 1989
- Proceedings of SPIE 1989
The use of ronchi rulings for high precision, two-dimensional galvo deflection systems
- D.J. Bernays
- 1989
- Proceedings of SPIE 1989
Aim-an automated inspection microscope for measuring critical dimensions
- Ronald J. LeMaster
- 1989
- Proceedings of SPIE 1989
Anti satellite weapons
- Richard L. Garwin
- Andrew D. White
- 1989
- Proceedings of SPIE 1989
Laser - assisted chemical etching
- F.A. Houle
- 1989
- Proceedings of SPIE 1989
Generation of coherent extreme ultraviolet and vacuum ultraviolet radiation using pulsed nozzles
- Charles T. Rettner
- Ernesto E. Marinero
- et al.
- 1989
- Proceedings of SPIE 1989
Effect of developer composition on photoresist performance
- William D. Hinsberg
- Monica L. Gutierrez
- 1989
- Proceedings of SPIE 1989
Polysilane Bilayer UV Lithography
- Donald C. Hofer
- Robert D. Miller
- et al.
- 1989
- Proceedings of SPIE 1989
Elemental and electronic characterization of semiconductor materials with the STEM
- P.E. Batson
- 1989
- Proceedings of SPIE 1989