Nano electro-machining (nano-EM): A novel method for sculpting nano vias (< 20 nm) for nanoscale packaging
- Ajay P. Malshe
- Kumar R. Virwani
- et al.
- 2008
- IMAPS 2008
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
Date
Featured collections
Popular topics
2 results for V. Kalyanasundaram
Tip-based nanomanufacturing by electrical, chemical, mechanical and thermal processes
- A.P. Malshe
- K.P. Rajurkar
- et al.
- 2010
- CIRP Annals - Manufacturing Technology