Future of plasma etching for microelectronics: Challenges and opportunities
- Gottlieb S. Oehrlein
- Stephan M. Brandstadter
- et al.
- 2024
- Journal of Vacuum Science and Technology B
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The 2021 release of the Quantemol database (QDB) of plasma chemistries and reactions
- Jonathan Tennyson
- Sebastian Mohr
- et al.
- 2022
- Plasma Sources Science and Technology