Publications

29 results for Hariklia Deligianni

Electrochemical planarization of interconnect metallization
- - Alan C. West
  - Hariklia Deligianni
  - et al.
- 2005
- IBM J. Res. Dev
The chemistry of additives in damascene copper plating
- - Philippe M. Vereecken
  - Robert A. Binstead
  - et al.
- 2005
- IBM J. Res. Dev
Uniform copper electroplating on resistive substrates
- - Rui Fang
  - Keisuke Namiki
  - et al.
- 2004
- ECS Meeting 2004
Simultaneous fabrication of RF MEMS switches and resonators using copper-based CMOS interconnect manufacturing methods
- - C.V. Jahnes
  - J.M. Cotte
  - et al.
- 2004
- MEMS 2004
Effect of benzotriazole on the anisotropic electrolytic etching of copper
- - Demetrius Papapanoyiotou
  - Hariklia Deligianni
  - et al.
- 1998
- JES
Damascene copper electroplating for chip interconnections
- - P.C. Andricacos
  - C. Uzoh
  - et al.
- 1998
- IBM J. Res. Dev
Effect of near-surface pH on electrodeposition of nickel on a rotating fine mesh electrode
- - H. Deligianni
  - L. Romankiw
- 1990
- AESF Annual Technical Conference 1990
Effect of near-surface pH on electrodeposition of nickel
- - H. Deligianni
  - L. Romankiw
- 1989
- ECS Meeting 1989
Effect of near-surface pH on electrodeposition of iron and permalloy
- - H. Deligianni
  - L. Romankiw
- 1989
- ECS Meeting 1989