Publications

3 results for Jean-François De Marneffe

Conversion of a Patterned Organic Resist into a High Performance Inorganic Hard Mask for High Resolution Pattern Transfer
- - Jean-François De Marneffe
  - Boon Teik Chan
  - et al.
- 2018
- ACS Nano
Tailored molecular glass resists for scanning probe lithography
- - Christian Neuber
  - Hans-Werner Schmidt
  - et al.
- 2015
- SPIE Advanced Lithography 2015
Molecular glass resists for scanning probe lithography
- - Christian Neuber
  - Andreas Ringk
  - et al.
- 2014
- SPIE Advanced Lithography 2014