Publications

2 results for Stefan Schmitz

Introduction of pre-etch deposition techniques in EUV patterning
- - Xun Xiang
  - Genevieve Beique
  - et al.
- 2018
- SPIE Advanced Lithography 2018
Plasma etch challenges with new EUV lithography material introduction for patterning for MOL and BEOL
- - Changwoo Lee
  - Bhaskar Nagabhirava
  - et al.
- 2015
- SPIE Advanced Lithography 2015