Searching for materials for next-generation on-chip interconnects
- Meherdad Kiani
- Alexander C. Tyner
- et al.
- 2025
- Newton
Publications
2 results for Judy Cha
The Viability of HFO-1234ze(E) (trans-1,3,3,3-Tetrafluoropropene) as a Low Global Warming Potential Silicon Dioxide Etch Gas
- Aaron Windsor
- Jeremy Clark
- et al.
- 2025
- JVSTB