Deep Learning Assisted Hybrid Metrology of Nanosheet Transistors for Fast Film Characterization
- Tao Cai
- Yifei Li
- et al.
- 2024
- MRS Fall Meeting 2024
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.