Publications

2 results for L.L. Simpson

Methacrylate terpolymer approach in the design of a family of chemically amplified positive resists
- - R.D. Allen
  - G.M. Wallraff
  - et al.
- 1991
- ACS Spring 1991
Chemically amplified photoresist for visible laser direct imaging
- - G.M. Wallraff
  - R.D. Allen
  - et al.
- 1991
- ACS Spring 1991