Publications

2 results for Hoosung Lee

Molecular design for stabilization of chemical amplification resist toward airborne contamination
- - Hiroshi Ito
  - William P. England
  - et al.
- 1993
- Microlithography 1993
Approach toward environmental stabilization of chemical amplification resists
- - Hiroshi Ito
  - William P. England
  - et al.
- 1993
- J. Photopolym. Sci. Tech.