Some mechanical and thermal properties of PECVD a-SixC1-x: H and a-SixN1-x: H films prepared by mixed frequency plasma processes
- V.J. Minkiewicz
- J. Stasiak
- et al.
- 1994
- Surface and Coatings Technology
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
Date
Featured collections
Popular topics
1 result for R.W. Cornell