Publications

4 results for Wilhelm Maurer

Failure prediction across process window for robust OPC
- - Shumay D. Shang
  - Yuri Granik
  - et al.
- 2003
- SPIE Advanced Microelectronic Manufacturing 2003
Failure prediction across process window for robust OPC
- - Shumay D. Shang
  - Yuri Granik
  - et al.
- 2003
- SPIE Advanced Lithography 2003
Optimization of resolution-enhanced photolithography for a 256Mb DRAM cell
- - R. Ferguson
  - Christopher P. Ausschnitt
  - et al.
- 1994
- VLSI Technology 1994
The application of deep UV phase shifted-single layer halftone reticles to 256 mbit dynamic random access memory cell patterns
- - Kohji Hashimoto
  - Donald J. Samuels
  - et al.
- 1994
- Japanese Journal of Applied Physics