Integration of a manufacturing grade, k = 2.0 spin-on material in a single damascene structure
- Willi Volksen
- Sampath Purushothaman
- et al.
- 2012
- ECS J. Solid State Sci. Technol.
Publications
54 results for Teddie P. Magbitang
Future of PECVD and spin-on ultra low-k materials
- Willi Volksen
- Theo Frot
- et al.
- 2011
- IITC/MAM 2011
Post Porosity Plasma Protection a new approach to integrate k 2.2 porous ULK materials
- Theo Frot
- Willi Volksen
- et al.
- 2011
- IITC/MAM 2011
A Manufacturing grade, porous oxycarbosilane spin-on dielectric candidate with K 2.0
- Willi Volksen
- Teddie P. Magbitang
- et al.
- 2011
- JES
Mechanical enhancement of low- k organosilicates by laser spike annealing
- Willi Volksen
- Geraud Dubois
- et al.
- 2008
- JES
Urea-bearing copolymers via raft polymerization for controlling macromolecular assemblies
- Amanda Kamps
- Teddie Magbitang
- et al.
- 2008
- ACS National Meeting 2008
Superior mechanical properties of dense and porous organic/inorganic hybrid thin films
- Geraud Dubois
- Willi Volksen
- et al.
- 2008
- Journal of Sol-Gel Science and Technology
Superior mechanical properties of dense and porous organic/inorganic hybrid thin films
- Willi Volksen
- Geraud Dubois
- et al.
- 2007
- VMIC 2007
Molecular network reinforcement of sol-gel glasses
- Geraud Dubois
- Willi Volksen
- et al.
- 2007
- Advanced Materials
Impact of curing kinetics and materials properties on imprint characteristics of resists for UV nanoimprint lithography
- Frances A. Houle
- Ann Fornof
- et al.
- 2007
- SPIE Advanced Lithography 2007