Publications

2 results for James T. Marsh

A high-speed, high-sensitivity silicon lateral trench photodetector
- - Min Yang
  - Kern Rim
  - et al.
- 2002
- IEEE Electron Device Letters
Characterization of a next generation step-and-scan system
- - Timothy J. Wiltshire
  - Joseph P. Kirk
  - et al.
- 1998
- SPIE Advanced Lithography 1998