ELIAD: Efficient Lithography Aware Detailed routing algorithm with compact and macro post-OPC printability predictionMinsik ChoKun Yuanet al.2009IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
ELIAD: Efficient lithography aware detailed routing algorithm with compact and macro post-OPC printability predictionMinsik ChoKun Yuanet al.2009IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems