Publications

2 results for S.-Y. Lee

Co capping layers for Cu/low-k interconnects
- - C.-C. Yang
  - P. Flaitz
  - et al.
- 2012
- Microelectronic Engineering
Co capping layers for Cu/low-k interconnects
- - C.-C. Yang
  - P. Flaitz
  - et al.
- 2010
- ADMETA 2010