Publications

3 results for Y.J. Choi

UV curing-induced photoresist poisoning in advanced ULK BEOL integration schemes
- - Y.C. Ee
  - D. Kioussis
  - et al.
- 2009
- ADMETA 2009
Material and process for advanced Cu/ULK integration
- - Chih-Chao Yang
  - Daniel C. Edelstein
  - et al.
- 2008
- ADMETA 2008
Porous low-k material etch for 32 nm and beyond
- - Catherine Labelle
  - John Arnold
  - et al.
- 2008
- ADMETA 2008