Publications

3 results for P.K. Leung

Processing and moisture effects on TDDB for Cu/ULK BEOL structures
- - E. Liniger
  - T.M. Shaw
  - et al.
- 2012
- Microelectronic Engineering
Processing and moisture effects on TDDB for Cu/ULK BEOL structures
- - Eric G. Liniger
  - T.M. Shaw
  - et al.
- 2010
- ADMETA 2010
The effect of material and process interactions on BEOL integration
- - T. Spooner
  - J.C. Arnold
  - et al.
- 2009
- ECS Meeting 2009