Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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8 results for M. Offenberg

Role of surface passivation in the integrated processing of MOS structures
- - M. Offenberg
  - M. Liehr
  - et al.
- 1990
- VLSI Technology 1990
HF surface passivation failure in integrated thermal oxidation processing
- - M. Liehr
  - M. Offenberg
  - et al.
- 1990
- SSDM 1990
Integrated Processing of MOS Gate Dielectric Structures
- - G.W. Rubloff
  - M. Offenberg
  - et al.
- 1994
- IEEE Trans Semicond Manuf
Hydrocarbon reaction with HF-cleaned Si(100) and effects on metal-oxide-semiconductor device quality
- - S.R. Kasi
  - M. Liehr
  - et al.
- 1991
- Applied Physics Letters
Surface etching and roughening in integrated processing of thermal oxides
- - M. Offenberg
  - M. liehr
  - et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Kinetics of silicon epitaxy using SiH₄ in a rapid thermal chemical vapor deposition reactor
- - M. Liehr
  - C.M. Greenlief
  - et al.
- 1990
- Applied Physics Letters
Ultraclean, integrated processing of thermal oxide structures
- - M. Offenberg
  - M. Liehr
  - et al.
- 1990
- Applied Physics Letters
Equilibrium surface hydrogen coverage during silicon epitaxy using SiH₄
- - C.M. Greenlief
  - M. Offenberg
  - et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films