Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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5 results for R.D. Estes

Role of gas phase reactions in silicon chemical vapor deposition from monosilane
- - B.A. Scott
  - R.D. Estes
- 1989
- Applied Physics Letters
Absolute rate constants for silylene reactions with diatomic molecules
- - J.O. Chu
  - D.B. Beach
  - et al.
- 1988
- Chemical Physics Letters
The role of surface reactions in monosilane pyrolysis
- - B.A. Scott
  - R.D. Estes
  - et al.
- 1988
- The Journal of Chemical Physics
Laser powered homogeneous pyrolysis of silane
- - J.M. Jasinski
  - R.D. Estes
- 1985
- Chemical Physics Letters
Detection of SiH₂ in silane and disilane glow discharges by frequency modulation absorption spectroscopy
- - J.M. Jasinski
  - E.A. Whittaker
  - et al.
- 1984
- Applied Physics Letters