Gregory Czap, Kyungju Noh, et al.
APS Global Physics Summit 2025
Five different fluorinated polyimides were characterized using X-ray photoelectron spectroscopy (XPS). Elemental compositions and polyimide stoichiometries as elucidated with XPS are reported. The fluorinated polyimides derived from corresponding poly(amic acid)s were completely imidizedafter thermal cure at 350°C, giving rise to a single N 1s peak at 400.8 eV. Interestingly, fluorine segregation on the cured polyimide surface was found to be a function of the polyimide backbone stiffness. © 1996 Taylor & Francis Group, LLC.
Gregory Czap, Kyungju Noh, et al.
APS Global Physics Summit 2025
Robert W. Keyes
Physical Review B
R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007