A. Schirmeisen, G. Cross, et al.
Applied Surface Science
A scheme is described that resolves the problem of coupling sensitive equipment to a heat exchanger while retaining excellent isolation against vibrations in an ultrahigh vacuum environment.
A. Schirmeisen, G. Cross, et al.
Applied Surface Science
U. Dürig
New Journal of Physics
A.W. Knoll, P. Bächtold, et al.
Microelectronic Engineering
A. Stalder, U. Dürig
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures