Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
No abstract available.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Sai Zeng, Angran Xiao, et al.
CAD Computer Aided Design
Anupam Gupta, Viswanath Nagarajan, et al.
Operations Research
David S. Kung
DAC 1998