Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We have used high- and low-energy X-ray photoelectron diffraction to determine the structure of formate adsorbed on TiO2(110). Formate binds to the surface through both oxygens to pairs of neighboring Ti4+ cations oriented along [001] to form a 2x1 overlayer. The O-C-O bond angle is 126±4°. The vertical distance between formate oxygens and surface Ti cations is 2.1±0.1 Å. These results are in good agreement with those from Hartree-Fock total energy minimization. © 1998 Elsevier Science B.V. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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Physical Review B
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Inorganic Chemistry
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