Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
This paper deals with the descriptive set theoretic properties of the class EC of continuous functions with everywhere convergent Fourier series. It is shown that this set is a complete coanalytic set in C(T). A natural coanalytic rank function on EC is studied that assigns to each f EC a countable ordinal number, which measures the “complexity” of the convergence of the Fourier series of f. It is shown that there exist functions in EC (in fact even differentiable ones) which have arbitrarily large countable rank, so that this provides a proper hierarchy on EC with wi distinct levels. © 1987 American Mathematical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Imran Nasim, Michael E. Henderson
Mathematics
A. Skumanich
SPIE OE/LASE 1992
I.K. Pour, D.J. Krajnovich, et al.
SPIE Optical Materials for High Average Power Lasers 1992