Conference paper
Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
The indeterminate state of the empirical law of electrodynamic action between two current elements is reviewed. It is shown that a form of the law fully consistent with experiment can be deduced from simple Newtonian dynamics. This law points to anomalies to be expected in electrodynamic interactions between electric particles of unequal charge-mass ratio. This result may account for certain hitherto unexplained anomalies in electric discharge phenomena. © 1969.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Ligang Lu, Jack L. Kouloheris
IS&T/SPIE Electronic Imaging 2002
A. Grill, B.S. Meyerson, et al.
Proceedings of SPIE 1989