Veeraraghvan S. Basker, Theodorus E. Standaert, et al.
VLSI Technology 2010
Conference paper
The future of SOI transistor technology
Abstract
■ Conventional devices are running out of steam ■ Fully depleted devices are needed ■ Substrates for planar fully depleted device are ready ■ SOI substrates can be used to enhance performance for both planar and non-planar FD options ■ Planar FD option is promising for future applications © 2011 IEEE.
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