B. Oh, R.H. Koch, et al.
Applied Physics Letters
A 248-nm laser pulse of 35 ns duration was split spatially into two beams: a strong beam used to completely ablate in a single pulse 1000- and 5000-Å-thick polyimide films on fused silica substrates, and a weak, time-delayed probe beam directed almost perpendicularly onto the sample through the ablated fragments in order to measure their transmission versus time. When ablating the 1000-Å-thick film at 1.1 J/cm2, a weak attenuation of the probe beam with a maximum value of 10-12% was observed during the laser pulse. Ablation of the 5000-Å-thick film at 4.2 J/cm2 showed a strong attenuation of 83% which lasted for 90 ns from the beginning of the ablating laser pulse and then dropped to 50% at 130 ns. These results indicate increased attenuation of the laser beam as the laser fluence increases, thus explaining the reduced ablation efficiency at high fluences.
B. Oh, R.H. Koch, et al.
Applied Physics Letters
A. Gupta, G. Koren, et al.
Applied Physics Letters
A. Gupta, R. Gross, et al.
Physical Review Letters
Soon-Gul Lee, C.C. Chi, et al.
SPIE Advances in Semiconductors and Superconductors 1990