Hemanth Jagannathan, Michael Deal, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Nanopores created by micellar star polymers in amorphous organic silsequioxane thermosets produce morphologically controlled porous materials for semiconductor chip applications (see picture). Pore size is independent of concentration and processing conditions, but depends solely on the size of the polymer molecule.
Hemanth Jagannathan, Michael Deal, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Naga Phani Aetukuri, Shintaro Kitajima, et al.
Advanced Energy Materials
Teddie Magbitang, Victor Y. Lee, et al.
Advanced Materials
William Hogan, Yoshiki Vazquez Baeza, et al.
NAACL 2021