Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The anomalous-muonium hyperfine interaction in germanium has been measured as a function of temperature between 5 and 100 K. It was found that the component perpendicular to the defect axis decreases while the component parallel to the axis increases as the temperature increases. Both effects are a result of the interaction of anomalous muonium with the germanium-host phonons. The temperature dependences of the anomalous-muonium hyperfine interaction in diamond, silicon, and germanium are compared. © 1983 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999
Julien Autebert, Aditya Kashyap, et al.
Langmuir
R.W. Gammon, E. Courtens, et al.
Physical Review B