Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A series of new ferroelectric liquid crystals characterized by the presence of a thioester core and an alkoxycarbonyl tail derived from a chiral 2-alkanol has been prepared and evaluated. The synthesis of these materials is straightforward and employs p-mercaptobenzoic acid as a critical intermediate. Some of the new liquid crystals are remarkable due to their large polarizations and rapid electro-optic switching near room temperature in the SSFLC configuration. © 1991 Gordon and Breach Science Publishers S.A.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Ranulfo Allen, John Baglin, et al.
J. Photopolym. Sci. Tech.
Robert W. Keyes
Physical Review B
K.N. Tu
Materials Science and Engineering: A