Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Photoacoustic studies of SF6 adsorbed on Ag surfaces have been performed with a CO2 laser. Simultaneous XPS measurements clearly demonstrate submonolayer surface sensitivity of photoacoustic spectroscopy under UHV conditions. The photoacoustic spectrum at 0.2 monolayer surface coverage shows a characteristic SF6 vibrational band. Furthermore, XPS spectra exhibit fine structures indicating distinctive SF6-Ag interactions. © 1983.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics
Shu-Jen Han, Dharmendar Reddy, et al.
ACS Nano