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Photoacoustic studies of SF6 adsorbed on Ag surfaces have been performed with a CO2 laser. Simultaneous XPS measurements clearly demonstrate submonolayer surface sensitivity of photoacoustic spectroscopy under UHV conditions. The photoacoustic spectrum at 0.2 monolayer surface coverage shows a characteristic SF6 vibrational band. Furthermore, XPS spectra exhibit fine structures indicating distinctive SF6-Ag interactions. © 1983.
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
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