E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Angle-resolved photoemission and inverse photoemission have been used to study the electronic structure of Si(111)7×7-Ge and Si(111)5×5-Ge surfaces. For both surfaces, one unoccupied and three occupied surface-state bands have been mapped along the K and M lines in the 1×1 surface Brillouin zone. These bands have characteristics similar to those of the surface-state bands observed for the clean Si(111)7×7 surface. Quantitative differences in the dispersions seem to correlate with the Ge content in the surfaces rather than with surface periodicity. © 1987 The American Physical Society.
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
U. Wieser, U. Kunze, et al.
Physica E: Low-Dimensional Systems and Nanostructures
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989