Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The uniform-charge-background (jellium) model of a bounded metal is shown to give good estimates of the electrostatic surface-dipole barriers in simple metals. © 1973 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Ming L. Yu
Physical Review B
R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics