Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The shot-noise power in a disordered phase-coherent conductor, much longer than the mean free path but much shorter than an inelastic scattering length, is one-third of the classical value of a Poisson process. The reduction below the classical value is a consequence of noiseless open quantum channels. In conductors much longer than an inelasic length, shot noise is further suppressed due to counterbalancing voltage fluctuations which enforce charge neutrality. © 1992 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Kigook Song, Robert D. Miller, et al.
Macromolecules
T.N. Morgan
Semiconductor Science and Technology
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering