PublicationJVSTAPaperSummary Abstract: Comparison between the adsorption of PH3 and B2H6 on Si surfaces as related to the CVD of SiJVSTAView publicationAbstractNo abstract available.Home↳ PublicationsDate01 Jan 1985PublicationJVSTAAuthorsM.L. YuD.J. VitkavageB.S. MeyersonIBM-affiliated at time of publicationTopicsPhysical SciencesMaterials DiscoveryShare