Polysilanes: photochemistry and deep UV lithography
R.D. Miller, G.M. Wallraff, et al.
SPE Regional Technical Conference 1988
The electrochemical and electrochromic properties of a variety of polysubstituted fluorene compounds have been studied. The 2,7- and 2,3-dimethoxy-, 2,3,6,7-tetramethoxy-, and 2,3,4,5,6,7-hexamethoxyfluorenes are highly reversible electrochromic materials. One-electron oxidation of these materials yields deeply colored, stable radical cations. The structure-property relationships observed for the electrochemical and absorption behavior of these materials are discussed. © 1980, American Chemical Society. All rights reserved.
R.D. Miller, G.M. Wallraff, et al.
SPE Regional Technical Conference 1988
Scott A. MacDonald, C.B. Larson, et al.
Microlithography 1993
G.A. Corker, B. Grant, et al.
JES
Hiroshi Ito, William P. England, et al.
Microlithography 1993