F.M. D'Heurle, J. Tersoff, et al.
Journal of Applied Physics
Using a Monte Carlo approach, we identify low-energy structures for the (001)-oriented Si-SiO2 interface. The optimal interface structure found consists of an ordered array of Si-O-Si “bridges,” with low strain energy. This structure explains several puzzling experimental observations. © 2000 The American Physical Society.
F.M. D'Heurle, J. Tersoff, et al.
Journal of Applied Physics
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Surface Science
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Epilepsia