Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The dynamical behaviour of systems exhibiting structural phase transitions is reviewed, with particular emphasis on the problems posed by the simultaneous existence of quasi-elastic and phonon features in the dynamic response of the soft coordinates. The results of scattering experiments revealing this phenomenon are surveyed in detail, and are used in an assessment of current theories, subdivided into three categories: those which seek to describe the phenomenon within an extended phonon-based theory; those which attempt to trace the effect to the formation of long-lived clusters of precursor order; and those which associate the quasi-elastic scattering with crystal imperfections. © Taylor & Francis Group, LLC.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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