Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The morphology and structure of sputtered Ta/Co/Ta thin-film sandwiches were investigated by cross-sectional high-resolution transmission electron microscopy. Although the Co layer shows an overall 〈111〉-oriented fcc structure, a high density of hcp stacking faults in present in the layer. The Co structure can thus be described as a random distribution of hcp stacking sequences in an overall fcc structure. © 1995.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
K.N. Tu
Materials Science and Engineering: A
J.K. Gimzewski, T.A. Jung, et al.
Surface Science
Peter J. Price
Surface Science