Conference paper
Single and dual wavelength exposure of photoresist
J. LaRue, C. Ting
Proceedings of SPIE 1989
Paper
Stable ergodicity
Related
James Lee Hafner
Journal of Number Theory
Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
M. Shub, B. Weiss
Ergodic Theory and Dynamical Systems