PublicationVLSI Technology 1993Conference paperSPIRIT - A bipolar/BiCMOS isolation technology for high-performance VLSIVLSI Technology 1993View publicationAbstractNo abstract available.Home↳ PublicationsDate17 May 1993PublicationVLSI Technology 1993AuthorsJ.N. BurghartzA.O. CifuentesJ. WarnockR.C. McIntoshCarol StanisJ.D. CresslerJ.Y.-C. SunJ.H. ComfortKeith A. JenkinsIBM-affiliated at time of publicationShare