Publication
MRS Proceedings 1993
Conference paper
Spectromicroscopic study of corrosion in Al-Cu-Si metallization
Abstract
Well known principles governing metallic corrosion are summarized in this paper. Several electrochemical techniques that are suitable for evaluation of corrosion reaction and mechanisms are discussed. The challenge of minimizing metallic degradation in processing, in storage and during operation is discussed with examples drawn from thin films used in the electronics industry.