Fausto Bernardini, Holly Rushmeier
Proceedings of SPIE - The International Society for Optical Engineering
Fausto Bernardini, Holly Rushmeier
Proceedings of SPIE - The International Society for Optical Engineering
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007
Shu Tezuka
WSC 1991