J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
No abstract available.
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
William G. Van der Sluys, Alfred P. Sattelberger, et al.
Polyhedron
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Q.R. Huang, Ho-Cheol Kim, et al.
Macromolecules