Shu-Jen Han, Dharmendar Reddy, et al.
ACS Nano
No abstract available.
Shu-Jen Han, Dharmendar Reddy, et al.
ACS Nano
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Hiroshi Ito, Reinhold Schwalm
JES