Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We investigate a first order displacive phase transition driven by an optical phonon instability. We find that in the low temperature phase the frequency of the optical phonon does not vanish at the stability limit T = Tu, defined by χT-1 = 0 where χT is the isothermal susceptibility. Instead, the heat diffusion constant, renormalized by the interaction with the soft optical phonon goes to zero as Tu is approached from below. © 1972.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
Ming L. Yu
Physical Review B
Gregory Czap, Kyungju Noh, et al.
APS Global Physics Summit 2025