Conference paper
Single and dual wavelength exposure of photoresist
J. LaRue, C. Ting
Proceedings of SPIE 1989
SUMMARY: An efficient method for simulating a nonhomogeneous Poisson process with rate function λ(t) = exp(α0+α1t) is given. The method ia based on an identity relating the nonhomogeneous Poisson process to the gap statistics from a random number of exponential random variables with suitably chosen parameters; it avoids costly ordering and taking of logarithms required by direct simulation methods and is more efficient than time scale transformations of a homogeneous Poisson process. © 1976 Biometrika Trust.
J. LaRue, C. Ting
Proceedings of SPIE 1989
Trang H. Tran, Lam Nguyen, et al.
INFORMS 2022
Jianke Yang, Robin Walters, et al.
ICML 2023
Hannaneh Hajishirzi, Julia Hockenmaier, et al.
UAI 2011