Patterning of highly conducting polyaniline films
T. Graham, A. Afzali, et al.
Microlithography 2000
A detailed analysis is presented to demonstrate the capabilities of the lattice Boltzmann method. Thorough comparisons with other numerical solutions for the two-dimensional, driven cavity flow show that the lattice Boltzmann method gives accurate results over a wide range of Reynolds numbers. Studies of errors and convergence rates are carried out. Compressibility effects are quantified for different maximum velocities and parameter ranges are found for stable simulations. The paper's objective is to stimulate further work using this relatively new approach for applied engineering problems in transport phenomena utilizing parallel computers. © 1995 by Academic Press, Inc.
T. Graham, A. Afzali, et al.
Microlithography 2000
M.B. Small, R.M. Potemski
Proceedings of SPIE 1989
Harpreet S. Sawhney
IS&T/SPIE Electronic Imaging 1994
John A. Hoffnagle, William D. Hinsberg, et al.
Microlithography 2003